Spezifikation Testergebnisse
For Microelectronic Use |
|
Assay (HF) (by acidimetry) |
1.05 - 1.15 % |
Color (APHA) |
≤10 |
Fluosilicic Acid (H₂SiF₆) |
≤0.010 % |
Residue after Ignition |
≤1 ppm |
Chloride (Cl) |
≤4 ppm |
Nitrate (NO₃) |
≤3 ppm |
Phosphate (PO₄) |
≤0.7 ppm |
Sulfate and Sulfite (as SO₄) |
≤3 ppm |
Trace Impurities - Aluminum (Al) |
≤50.0 ppb |
Arsenic and Antimony (as As) |
≤30.0 ppb |
Trace Impurities - Barium (Ba) |
≤20.0 ppb |
Trace Impurities - Boron (B) |
≤50 ppb |
Trace Impurities - Cadmium (Cd) |
≤20.0 ppb |
Trace Impurities - Calcium (Ca) |
≤80 ppb |
Trace Impurities - Chromium (Cr) |
≤10.0 ppb |
Trace Impurities - Cobalt (Co) |
≤20 ppb |
Trace Impurities - Copper (Cu) |
≤20.0 ppb |
Trace Impurities - Gallium (Ga) |
≤20.0 ppb |
Trace Impurities - Germanium (Ge) |
≤50.0 ppb |
Trace Impurities - Gold (Au) |
≤20 ppb |
Heavy Metals (as Pb) |
≤50.0 ppb |
Trace Impurities - Iron (Fe) |
≤80.0 ppb |
Trace Impurities - Lead (Pb) |
≤100 ppb |
Trace Impurities - Lithium (Li) |
≤20.0 ppb |
Trace Impurities - Magnesium (Mg) |
≤50.0 ppb |
Trace Impurities - Manganese (Mn) |
≤20.0 ppb |
Trace Impurities - Nickel (Ni) |
≤20.0 ppb |
Trace Impurities - Potassium (K) |
≤100 ppb |
Trace Impurities - Silicon (Si) |
≤1000.0 ppb |
Trace Impurities - Silver (Ag) |
≤10.0 ppb |
Trace Impurities - Sodium (Na) |
≤100.0 ppb |
Trace Impurities - Strontium (Sr) |
≤20.0 ppb |
Trace Impurities - Tin (Sn) |
≤50 ppb |
Trace Impurities - Titanium (Ti) |
≤300.0 ppb |
Trace Impurities - Zinc (Zn) |
≤50 ppb |
Particle Count - 1.0 µm and greater |
≤10 par/ml |